Reliable particle counting for monitoring clean room quality
FPM-Particle inspects thin glass substrates with high precision, providing a statistical analysis of particle distribution. With high resolution cameras and special illumination technology, the system detects particles down to the micrometer range and classifies them by size. It, therefore, delivers reliable data for monitoring clean room quality and optimizing the cleaning process.
Users can add the extension products FPM-Inspect, FPM-Edge and FPM-Review to enhance the particle inspection with surface and edge inspection, as well as an automatic microscope for investigating detected defects.
- Individual or multiple sensor set-up for inspection of web or complete substrate
- Complete product range for surface and edge inspection, plus review station
- Extremely short inspection line for thin glass substrates
- Sub micron particle counting
- > 99,9 % Classification top side/bottom side
Download additional information
Automotive Overview brochure
FPM-Master brochure en
- Filename
- brochure-flatpanelmaster-glass-en.pdf
- Size
- 805 KB
- Format
FPM-Master brochure cn
FPM-Master brochure cn
- Filename
- brochure-flatpanelmaster-glass-cn.pdf
- Size
- 902 KB
- Format
FPM-Master brochure ko
FPM-Master brochure ko
- Filename
- brochure-flatpanelmaster-glass-ko.pdf
- Size
- 914 KB
- Format
